MIE506H1: * MEMS Design and Microfabrication


This course will present the fundamental basis of microelectromechanical systems (MEMS). Topics will include: micromachining/microfabrication techniques, micro sensing and actuation principles and design, MEMS modeling and simulation, and device characterization and packaging. Students will be required to complete a MEMS design term project, including design modeling, simulation, microfabrication process design, and photolithographic mask layout.

51.9 (Fall), 51.9 (Winter), 103.8 (Full Year)